Ordered silicon nanostructures by ion beam induced glancing angle deposition
Author:
Publisher
American Vacuum Society
Subject
Electrical and Electronic Engineering,Condensed Matter Physics
Cited by 31 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Ion Beam Sputtering Induced Glancing Angle Deposition;Low-Energy Ion Irradiation of Materials;2022
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4. Nanostructured Ti–Ta thin films synthesized by combinatorial glancing angle sputter deposition;Nanotechnology;2016-11-11
5. Destructive and constructive routes to prepare nanostructures on surfaces by low-energy ion beam sputtering;SPIE Proceedings;2016-10-03
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