Author:
Gao Di,Wijesundara Muthu B. J.,Carraro Carlo,Howe Roger T.,Maboudian Roya
Cited by
11 articles.
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1. UV nanosecond laser machining and characterization for SiC MEMS sensor application;Sensors and Actuators A: Physical;2018-06
2. Advances in silicon carbide science and technology at the micro- and nanoscales;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2013-09
3. Passive Substrate Temperature Compensation of Doubly Anchored Double-Ended Tuning Forks;Journal of Microelectromechanical Systems;2012-12
4. Packaging;Silicon Carbide Microsystems for Harsh Environments;2011
5. SiC MEMS devices;Silicon Carbide Microsystems for Harsh Environments;2011