Dose control for fabrication of grayscale structures using a single step electron-beam lithographic process
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Published:2003
Issue:6
Volume:21
Page:2672
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Hu Fei,Lee Soo-Young
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
36 articles.
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