Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization-Reference-Cited by-同舟云学术

Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization

Published:2019-07 Issue:4 Volume:37 Page:041502
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Hönicke Philipp¹^ORCID,Detlefs Blanka²,Nolot Emmanuel²,Kayser Yves¹^ORCID,Mühle Uwe³,Pollakowski Beatrix¹,Beckhoff Burkhard¹

Affiliation:

1. Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany

2. CEA-LETI, 17 rue des Martyrs, 38054 Grenoble, France

3. TU Dresden, Institute of Material Science, Helmholtzstr. 7, 01062 Dresden, Germany

Funder

European Association of National Metrology Institutes

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5094891

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