Summary Abstract: Surface analysis of amorphous Ta–Cu thin films deposited on GaAs
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Published:1988-05
Issue:3
Volume:6
Page:983-984
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Pouch J. J.,Alterovitz S. A.,Woollam J. A.,Oh J. E.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics