Effect of ion bombardment during deposition on magnetic film properties
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Published:1981-03
Issue:2
Volume:18
Page:153-155
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Herte L. F.,Lang A.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
13 articles.
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