Fourier transform infrared studies of polyimide and poly(methyl‐methacrylate) surfaces during downstream microwave plasma etching-Reference-Cited by-同舟云学术

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Fourier transform infrared studies of polyimide and poly(methyl‐methacrylate) surfaces during downstream microwave plasma etching

Published:1991-11 Issue:6 Volume:9 Page:2948-2962
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Leu Jihperng,Jensen Klavs F.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.577156

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