Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings-Reference-Cited by-同舟云学术

Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings

Published:2018-03 Issue:2 Volume:36 Page:021601
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Chen Xiuguo¹,Shimizu Yuki²,Chen Chong²,Chen Yuan-Liu²,Gao Wei²

Affiliation:

1. Department of Finemechanics, Tohoku University, 6-6-01 Aramaki-Aza Aoba, Aoba-ku, Sendai 9808579, Japan and School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China

2. Department of Finemechanics, Tohoku University, 6-6-01 Aramaki-Aza Aoba, Aoba-ku, Sendai 9808579, Japan

Funder

MEXT | Japan Society for the Promotion of Science

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5016505

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