1. Department of Micro and Nanotechnology, Middle East Technical University, Universiteler Mahallesi, Dumlupinar Bulvari No: 1, Cankaya, Ankara 06800, Turkey and Mikro Biyosistemler Electronics Inc., Mustafa Kemal Mahallesi, Dumlupinar Bulvari, No: 280-B, Cankaya, Ankara 06530, Turkey
2. Mikro Biyosistemler Electronics, Inc., Mustafa Kemal Mahallesi, Dumlupinar Bulvari, No: 280-B, Cankaya, Ankara 06530, Turkey
3. Department of Electrical and Electronics Engineering, Middle East Technical University, Universiteler Mahallesi, Dumlupinar Bulvari No: 1, Cankaya, Ankara 06800, Turkey; Department of Micro and Nanotechnology, Middle East Technical University, Universiteler Mahallesi, Dumlupinar Bulvari No: 1, Cankaya, Ankara 06800, Turkey; and Mikro Biyosistemler Electronics, Inc., Mustafa Kemal Mahallesi, Dumlupinar Bulvari, No: 280-B, Cankaya, Ankara 06530, Turkey