Characterization of diamond sonic micronozzles and microtube-Reference-Cited by-同舟云学术

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Characterization of diamond sonic micronozzles and microtube

Published:2003 Issue:5 Volume:21 Page:2034
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Mammana S. S.,Salvadori M. C.,Kawakita K.,Pereira M. T.,Cattani M.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Discharge characteristics of small sonic nozzles in the shape of pyramidal convergent and conical divergent;Flow Measurement and Instrumentation;2012-06

2. Flow characteristics of pyramidal shaped small sonic nozzles;Flow Measurement and Instrumentation;2011-03

3. Performance test of KOH-etched silicon sonic nozzles;Flow Measurement and Instrumentation;2009-06

4. Critical parameter determination of sonic flow controller diamond microtubes and micronozzles;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007

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