X-ray micro- and nanofabrication using a laser–plasma source at 1 nm wavelength-Reference-Cited by-同舟云学术

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X-ray micro- and nanofabrication using a laser–plasma source at 1 nm wavelength

Published:1997-11 Issue:6 Volume:15 Page:2495
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Turcu I. C. E.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Freestanding Three-Dimensional Copper Foils Prepared by Electroless Deposition on Micropatterned Gels;Advanced Materials;2005-03-22

2. Micro- and nanotechnology via reaction–diffusion;Soft Matter;2005

3. A finite ground coplanar line-to-silicon micromachined waveguide transition;IEEE Transactions on Microwave Theory and Techniques;2001

4. A plasma light source for the VUV spectral region;IEEE Journal of Selected Topics in Quantum Electronics;1999

5. X-ray emission from laser-produced plasmas;La Rivista del Nuovo Cimento;1998-10

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