Real-time in situ process monitoring and characterization of GaN films grown on Si (100) by low-temperature hollow-cathode plasma-atomic layer deposition using trimethylgallium and N2/H2 plasma

Author:

Shukla Deepa12,Mohammad Adnan1,Ilhom Saidjafarzoda1,Willis Brian G.3,Okyay Ali Kemal45,Biyikli Necmi12ORCID

Affiliation:

1. Department of Electrical & Computer Engineering, University of Connecticut, 371 Fairfield Way, Storrs, Connecticut 06269

2. Institute of Materials Science, University of Connecticut, 97 North Eagleville Road, Storrs, Connecticut 06269

3. Department of Chemical and Biomolecular Engineering, University of Connecticut, 191 Auditorium Road, Storrs, Connecticut 06269

4. Department of Electrical Engineering, Stanford University, Stanford, California 94305

5. Okyay Technologies, Inc., Ankara 06374, Turkey

Funder

University of Connecticut

Division of Chemical, Bioengineering, Environmental, and Transport Systems

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3