Phase formation in sputter deposited metal (V, Nb, Zr, Y) oxides: Relationship to metal, metal–oxygen, and oxygen flux-Reference-Cited by-同舟云学术

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Phase formation in sputter deposited metal (V, Nb, Zr, Y) oxides: Relationship to metal, metal–oxygen, and oxygen flux

Published:1993-07 Issue:4 Volume:11 Page:1540-1547
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Aita Carolyn Rubin

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.578502

Cited by 29 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Reactive sputter deposition of metal oxide nanolaminates;Journal of Physics: Condensed Matter;2008-06-09

2. Near-edge optical absorption behavior of sputter deposited hafnium dioxide;Journal of Applied Physics;2007-06-15

3. Mosaic nanostructure of TiO2 with rutile short-range atomic order;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2006-11

4. Near-ultraviolet optical absorption behavior of TiO2–Al2O3 multilayer films;Journal of Applied Physics;2006-06-15

5. Microstructure Effects on the Electrochemical Kinetics of Vanadium Pentoxide Thin-Film Cathodes;Journal of The Electrochemical Society;2006

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