Sensitivity of the focusing property of optimized electrostatic lenses
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Published:1993-07
Issue:4
Volume:11
Page:1267
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
2 articles.
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1. Synthesis of electrostatic focusing and deflection systems;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-11
2. Computer simulation for electrostatic lenses by using piecewise polynomials;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-06