Microfabrication of arrays of scanning electron microscopes
-
Published:1994-11
Issue:6
Volume:12
Page:3182
-
ISSN:0734-211X
-
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
-
language:
-
Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Notes and References;Principles of Electron Optics;2018
2. The early history and future of the SEM;Surface and Interface Analysis;2006
3. Three-dimensional fabrication of miniature electron optics;Electron Microscopy and Holography;2002
4. Scanning Electron Microscopy;Encyclopedia of Materials: Science and Technology;2001
5. Miniature Electron Optics;Advances in Imaging and Electron Physics;1997