Modification of surface condition and irradiation effects of synchrotron radiation on photoexcited etching of SiC
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Published:1995-11
Issue:6
Volume:13
Page:2715-2720
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Terakado Shingo,Ogura Masayoshi,Suzuki Shigeo,Nakao Masao,Tanaka Kenichiro
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics