Gain and loss mechanisms for neutral species in low pressure fluorocarbon plasmas by infrared spectroscopy-Reference-Cited by-同舟云学术

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Gain and loss mechanisms for neutral species in low pressure fluorocarbon plasmas by infrared spectroscopy

Published:2012-09 Issue:5 Volume:30 Page:051308
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Nelson Caleb T.,Overzet Lawrence J.,Goeckner Matthew J.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4746411

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fourier transform infrared spectroscopy of trifluoroiodomethane plasma;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-11

2. QDB: a new database of plasma chemistries and reactions;Plasma Sources Science and Technology;2017-04-04

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