Influence of fill gases on the failure rate of gated silicon field emitter arrays
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Published:1996-05
Issue:3
Volume:14
Page:1914
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
4 articles.
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1. Vacuum microelectronic devices and vacuum requirements;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2005-07
2. Field emission influenced by residual gas and passivation of field emitters by diamond coating;Applied Surface Science;2003-06
3. Vacuum Microelectronics;Wiley Encyclopedia of Electrical and Electronics Engineering;1999-12-27
4. Effect of gas ambient on improvement in emission behavior of Si field emitter arrays;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-03