Author:
Boswell R. W.,Perry A. J.,Emami M.
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
66 articles.
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1. Advanced microfabrication methods;Nano- and Microfabrication for Industrial and Biomedical Applications;2016
2. Plasma etching: Yesterday, today, and tomorrow;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2013-09
3. Advanced Microfabrication Methods;Microfabrication for Industrial Applications;2011
4. A New High-Performance Ion Source Based on Magnetically Neutral Loop Discharge;Japanese Journal of Applied Physics;2010-11-22
5. Current–temperature measurements of a SBD evaporated onto inductively coupled plasma cleaned germanium;Physica B: Condensed Matter;2009-12