Fabrication of radiation hardened SOI with embedded Si nanocrystal by ion-cut technique-Reference-Cited by-同舟云学术

Fabrication of radiation hardened SOI with embedded Si nanocrystal by ion-cut technique

Published:2017-03 Issue:2 Volume:35 Page:020603
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Chang Yongwei,Cheng Shi,Dai Lihua,Chen Da,Xue Zhongying,Dong Yemin,Wei Xing,Wang Xi

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4977577

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