Tutorial on interpreting x-ray photoelectron spectroscopy survey spectra: Questions and answers on spectra from the atomic layer deposition of Al2O3 on silicon-Reference-Cited by-同舟云学术

Tutorial on interpreting x-ray photoelectron spectroscopy survey spectra: Questions and answers on spectra from the atomic layer deposition of Al2O3 on silicon

Published:2018-11 Issue:6 Volume:36 Page:062902
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Shah Dhruv¹,Patel Dhananjay I.¹,Roychowdhury Tuhin¹,Rayner G. Bruce²,O’Toole Noel²,Baer Donald R.³,Linford Matthew R.¹

Affiliation:

1. Department of Chemistry and Biochemistry, Brigham Young University, Provo, Utah 84602

2. The Kurt J. Lesker Company, Jefferson Hills, Pennsylvania 15025

3. Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory, Richland, Washington 99352

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5043297

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