Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O2 plasma jet-Reference-Cited by-同舟云学术

Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O2 plasma jet

Published:2017-09 Issue:5 Volume:35 Page:05C315
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Luan Pingshan¹,Knoll Andrew J.¹,Bruggeman Peter J.²,Oehrlein Gottlieb S.¹

Affiliation:

1. Department of Materials Science and Engineering and the Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742

2. Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455

Funder

National Science Foundation (NSF)

U.S. Department of Energy (DOE)

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.5000691

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