Bixbyite-Ta2N2O film prepared by HiPIMS and postdeposition annealing: Structure and properties-Reference-Cited by-同舟云学术

Bixbyite-Ta2N2O film prepared by HiPIMS and postdeposition annealing: Structure and properties

Author:

Čapek J.¹,Batková Š.¹,Matas M.¹,Kos Š.¹,Kozák T.¹,Haviar S.¹,Houška J.¹,Schusser J.²³,Minár J.²,Dvořák F.⁴,Zeman P.¹

Affiliation:

1. Department of Physics and NTIS–European Centre of Excellence, University of West Bohemia, Univerzitní 8, 301 00 Plzeň, Czech Republic

2. New Technologies–Research Centre, University of West Bohemia, Univerzitní 8, 301 00 Plzeň, Czech Republic

3. Département de Physique, Université de Cergy-Pontoise, 5 mail Gay-Lussac, 95031 Cergy-Pontoise, France

4. Center of Materials and Nanotechnologies, University of Pardubice, Studentská 95, 532 10 Pardubice, Czech Republic

Funder

Czech Science Foundation

Ministry of Education, Youth, and Sports of Czech Republic

Erupean Regional Development Fund-Project

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

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