Cross‐sectional transmission electron microscopy/electron beam induced current investigations on as‐grown and hydrogen‐passivated, gas‐assisted solidified polycrystalline silicon
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Published:1989-11
Issue:6
Volume:7
Page:3295-3300
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Chu C. H.,Sun C. Y.,Hwang H. L.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics