Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As
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Published:2006
Issue:4
Volume:24
Page:1863
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ISSN:1071-1023
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Reuter D.,Riedesel C.,Wieck A. D.
Publisher
American Vacuum Society
Subject
Electrical and Electronic Engineering,Condensed Matter Physics