UV hardening of photo‐ and electron beam resist patterns
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Published:1981-11
Issue:4
Volume:19
Page:1132-1135
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Hiraoka H.,Pacansky J.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
34 articles.
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