Optical self-absorption technique for qualitative measurement of excited-state densities in plasma reactors
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.581529
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1. Optical emission spectroscopy diagnostics for plasma parameters investigation in a Duo-Plasmaline surface-wave sustained discharge;Spectrochimica Acta Part B: Atomic Spectroscopy;2022-08
2. Physico-Chemical Processes Induced by Electrical Breakdown and Discharge Responsible for Memory Effect in Krypton with < 10 ppm Nitrogen;Plasma Chemistry and Plasma Processing;2017-12-28
3. Self-absorption method in combination with an optical probe: a possibility to determine the radial density profile of rare-gas metastables in low-temperature plasmas;Plasma Sources Science and Technology;2015-06-05
4. Measurements of the populations of metastable and resonance levels in the plasma of an RF capacitive discharge in argon;Plasma Physics Reports;2015-05
5. The influence of the spatial nonuniformity on the measurement of Ar*(1s5) density by the self-absorption technique;Journal of Physics D: Applied Physics;2013-10-31
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