Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
5 articles.
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1. Vibration control of a turbomolecular vacuum pump using piezoelectric actuators;Proceedings of the 45th IEEE Conference on Decision and Control;2006
2. Computational optimization of diffusion pump parameters;Vacuum;1993-05
3. Six years of ‘‘dry pumping’’: A review of experience and issues;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1991-05
4. Selection criteria for oil‐free vacuum pumps;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1989-05
5. The emerging technologies of oil‐free vacuum pumps;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1988-05