Physical and electrical properties of thermally oxidized dielectrics on Si-capped Ge-on-Si substrate
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Published:2012-01
Issue:1
Volume:30
Page:011202
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ISSN:2166-2746
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Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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language:en
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Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Author:
Zheng Yuanyu,Liu Guanzhou,Li Cheng,Huang Wei,Chen Songyan,Lai Hongkai
Publisher
American Vacuum Society
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials