The effects of biasing and annealing on the optical properties of radio‐frequency sputtered VO2-Reference-Cited by-同舟云学术

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The effects of biasing and annealing on the optical properties of radio‐frequency sputtered VO2

Published:1990-05 Issue:3 Volume:8 Page:1391-1394
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Razavi A.,Bobyak L.,Fallon P.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.576887

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Delicate tuning of epitaxial VO2 films for ultra-sharp electrical and intense IR optical switching properties;Journal of Alloys and Compounds;2021-02

2. Synthesis of vanadium dioxide thin films and nanostructures;Journal of Applied Physics;2020-12-21

3. The Effect of Substrate Biasing during DC Magnetron Sputtering on the Quality of VO2 Thin Films and Their Insulator–Metal Transition Behavior;Materials;2019-07-05

4. Improvement of temperature coefficient of resistance of a VO2film on an SiN/polyimide/Si substrate by excimer laser irradiation for IR sensors;Japanese Journal of Applied Physics;2014-04-17

5. Effect of Oxide Buffer Layer on the Thermochromic Properties of VO2 Thin Films;Journal of Materials Engineering and Performance;2013-10-01

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