Realization of a high vacuum evaporation system for wave-length shifter deposition on photo-detector windows-Reference-Cited by-同舟云学术

Realization of a high vacuum evaporation system for wave-length shifter deposition on photo-detector windows

Published:2018-01 Issue:1 Volume:36 Page:01A101
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Bonesini Maurizio,Mazza Roberto,Cervi Tommaso,Menegolli Alessandro,Prata Marco Cesare,Raselli Gian Luca,Rossella Massimo,Spanu Maura Ninuccia,Torti Marta

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4996446

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