Optical-constant tunable (ZrO[sub 2])[sub x]/(Cr[sub 2]O[sub 3])[sub y]/(Al[sub 2]O[sub 3])[sub 1−x−y] optical superlattices for attenuated phase shift mask in ArF lithography
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Published:2001
Issue:6
Volume:19
Page:2617
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Lai F. D.,Wang L. A.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
3 articles.
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