Simple, low degree-of-freedom load-lock and in-vacuum sample transfer-Reference-Cited by-同舟云学术

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Simple, low degree-of-freedom load-lock and in-vacuum sample transfer

Published:2020-09 Issue:5 Volume:38 Page:054201
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Schalk Catlin N.¹,Turner David A.¹,Gans-Forrest Ashley R.¹,Jobbins Matthew M.¹,Kandel S. Alex¹^ORCID

Affiliation:

1. Department of Chemistry and Biochemistry, University of Notre Dame, Notre Dame, Indiana 46556

Funder

Division of Chemistry

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/6.0000495

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