Fabrication of free-standing silicon carbide on silicon microstructures via massive silicon sublimation-Reference-Cited by-同舟云学术

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Fabrication of free-standing silicon carbide on silicon microstructures via massive silicon sublimation

Published:2020-11 Issue:6 Volume:38 Page:062202
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Amjadipour Mojtaba¹^ORCID,MacLeod Jennifer²^ORCID,Motta Nunzio²^ORCID,Iacopi Francesca¹^ORCID

Affiliation:

1. School of Electrical and Data Engineering, Faculty of Engineering and Information Technology, University of Technology Sydney, Sydney, New South Wales 2007, Australia

2. School of Chemistry and Physics, Science and Engineering Faculty, Queensland University of Technology (QUT), Brisbane, Queensland 4000, Australia

Funder

Air Force Office of Scientific Research

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/6.0000490

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Synthesis of ultrathin heteroepitaxial 3C-SiC films by pyrolysis of molecular layer deposition polyamide films on Si;Journal of Vacuum Science & Technology A;2022-09

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