Thin film deposition research and its impact on microelectronics scaling
Author:
Affiliation:
1. IBM T.J. Watson Research Laboratory, PO Box 218 Rt. 134, Yorktown Heights, New York 10598
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/6.0000230
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