Theoretical and experimental characterization of a low-pressure rf plasma and its optimization in electron-gas secondary-neutral mass spectrometry-Reference-Cited by-同舟云学术

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Theoretical and experimental characterization of a low-pressure rf plasma and its optimization in electron-gas secondary-neutral mass spectrometry

Published:2001-01 Issue:1 Volume:19 Page:108-117
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Bieck W.,Merz E.,Gnaser H.,Oechsner H.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1329117

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ion optical effects in a low pressure rf plasma;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2013-11

2. Detection in the ppm range and high-resolution depth profiling with the new SNMS instrument INA-X;Applied Physics A: Materials Science & Processing;2004-03-01

3. Atomic Spectrometry Update. Atomic mass spectrometry;Journal of Analytical Atomic Spectrometry;2002-07-11

4. Current Awareness;Journal of Mass Spectrometry;2001

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