Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology-Reference-Cited by-同舟云学术

Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology

Published:2018-11 Issue:6 Volume:36 Page:06J101
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Gierak Jacques¹,Mazarov Paul²,Bruchhaus Lars²,Jede Ralf²,Bischoff Lothar³

Affiliation:

1. Centre de Nanosciences et de Nanotechnologies (CNRS—Université Paris-Sud), Avenue de la Vauve, 91120 Palaiseau, France

2. Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany

3. Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany

Funder

Centre National de la Recherche Scientifique

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5047150

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