High-resolution three-dimensional reconstruction: A combined scanning electron microscope and focused ion-beam approach-Reference-Cited by-同舟云学术

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High-resolution three-dimensional reconstruction: A combined scanning electron microscope and focused ion-beam approach

Published:2006 Issue:2 Volume:24 Page:554
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Bansal R. K.,Kubis A.,Hull R.,Fitz-Gerald J. M.

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

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