Suspended metal mask techniques in Josephson junction fabrication
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Published:1985-01
Issue:1
Volume:3
Page:282
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
6 articles.
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1. LTS Josephson Junctions and Circuits;digital Encyclopedia of Applied Physics;2015-12-08
2. Technology, Preparation, and Characterization;Applied Superconductivity;2015-01-30
3. Josephson SNS microbridges fabricated by double electron beam lithography;Microelectronic Engineering;1989-05
4. Pattern transfer by dry etching through stencil masks;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-01
5. Radiation Exposure;Semiconductor Lithography;1988