1. nano analytik GmbH, Ehrenbergstraße 1, 98693 Ilmenau, Germany
2. Department of Micro- and Nanoelectronic Systems, Institute of Micro and Nanoelectronics, Ilmenau University of Technology, Gustav-Kirchhoff-Str. 1, 98693 Ilmenau, Germany
3. Mikrosistemi LTD, Studentska 1a Str. Office 8, 9010 Varna, Bulgaria