Molecular layer deposition using cyclic azasilanes, maleic anhydride, trimethylaluminum, and water-Reference-Cited by-同舟云学术

Molecular layer deposition using cyclic azasilanes, maleic anhydride, trimethylaluminum, and water

Published:2017-01 Issue:1 Volume:35 Page:01B136
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Ju Ling¹,Bao Bo¹,King Sean W.²,Strandwitz Nicholas C.¹

Affiliation:

1. Department of Materials Science and Engineering and Center for Advanced Materials and Nanotechnology, Lehigh University, Bethlehem, Pennsylvania 18015

2. Intel Corporation, Hillsboro, Oregon 97124

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4972418

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