Bonding and morphology study of carbon nitride films obtained by dual ion beam sputtering-Reference-Cited by-同舟云学术

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Bonding and morphology study of carbon nitride films obtained by dual ion beam sputtering

Published:2000-03 Issue:2 Volume:18 Page:515-523
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Quirós C.,Prieto P.,Fernández A.,Elizalde E.,Morant C.,Schlögl R.,Spillecke O.,Sanz J. M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.582218

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5. Effect of nitrogen plasma afterglow on the surface charge effect resulted during XPS surface analysis of amorphous carbon nitride thin films;Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy;2018-06

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