Fabrication of sub-micrometer 3D structures for terahertz oscillators by electron beam gray-tone lithography-Reference-Cited by-同舟云学术

Fabrication of sub-micrometer 3D structures for terahertz oscillators by electron beam gray-tone lithography

Published:2022-03 Issue:2 Volume:40 Page:023206
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Bezhko Mikhail¹^ORCID,Suzuki Safumi¹,Iino Shota¹,Asada Masahiro²

Affiliation:

1. Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152-8552, Japan

2. Institute of Innovative Research, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152-8552, Japan

Funder

Japan Society for the Promotion of Science

Accelerated Innovation Research Initiative Turning Top Science and Ideas into High-Impact Values

Core Research for Evolutional Science and Technology

Adaptable and Seamless Technology Transfer Program through Target-Driven R and D

Ministry of Internal Affairs and Communications

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001647

Reference49 articles.

1. Cutting-edge terahertz technology

2. Terahertz technologies: present and future

3. Development and future prospects of terahertz technology

4. A 0.53 THz Reconfigurable Source Module With Up to 1 mW Radiated Power for Diffuse Illumination in Terahertz Imaging Applications

5. High-Power Radiation at 1 THz in Silicon: A Fully Scalable Array Using a Multi-Functional Radiating Mesh Structure

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fundamentals and recent advances of terahertz resonant tunneling diodes;Applied Physics Express;2024-07-01

2. Investigation of heat-dissipation structures in resonant tunneling diodes and their characteristics on terahertz oscillators;Japanese Journal of Applied Physics;2024-01-01