Submicron optical pattern generator—Electromagnetic drive with automated exposure system
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Published:1979-11
Issue:6
Volume:16
Page:1934-1937
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Nishizawa Jun‐ichi
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
2 articles.
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