Optical beam-deflection scanning force microscope with easy cantilever-laser beam alignment
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Published:1994-03
Issue:2
Volume:12
Page:620
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Sugihara Kazuyoshi
Publisher
American Vacuum Society
Subject
General Engineering