Preparation of low-reflectivity aluminum film using direct current magnetron sputtering in Ar/O[sub 2] and Ar/N[sub 2] atmospheres
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Published:2000
Issue:5
Volume:18
Page:2565
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Kamoshida Kazuyoshi
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
3 articles.
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