Ru nucleation and thin film smoothness improvement with ammonia during chemical vapor deposition
Author:
Affiliation:
1. McKetta Department of Chemical Engineering, University of Texas at Austin, 200 E Dean Keeton St., Stop C0400, Austin, Texas 78712
Funder
National Science Foundation (NSF)
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://scitation.aip.org/deliver/fulltext/avs/journal/jvsta/34/3/1.4944852.pdf?itemId=/content/avs/journal/jvsta/34/3/10.1116/1.4944852&mimeType=pdf&containerItemId=content/avs/journal/jvsta
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