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New polymer materials for nanoimprinting

Published:2000 Issue:4 Volume:18 Page:1861
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Schulz H.,Scheer H.-C.,Hoffmann T.,Sotomayor Torres C. M.,Pfeiffer K.,Bleidiessel G.,Grützner G.,Cardinaud Ch.,Gaboriau F.,Peignon M.-C.,Ahopelto J.,Heidari B.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 72 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanofabrication through molding;Progress in Materials Science;2022-04

2. Addition-curable polyimides, fluoropolyimides, and other polymers: their structural characteristics, cross-linking mechanisms, and high-tech applications;Handbook of Thermoset Plastics;2022

3. Microstructure and composition dependence of mechanical characteristics of nanoimprinted AlCoCrFeNi high-entropy alloys;Scientific Reports;2021-07-01

4. Extrinsic plastic hardening of polymer thin films in flat punch indentation;Philosophical Magazine;2021-04-06

5. Fabrication of TiO2 nanotubes and PDMS nanopillar by using anodization process to stamping technique;Materials Today: Proceedings;2021

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