Volume/surface effects on electron energy and dissociation reactions in large-volume plasma reactors-Reference-Cited by-同舟云学术

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Volume/surface effects on electron energy and dissociation reactions in large-volume plasma reactors

Published:1999-07 Issue:4 Volume:17 Page:1520-1525
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Kinoshita Keizo,Noda Shuichi,Morishita Satoshi,Itabashi Naoshi,Okigawa Mitsuru,Sekine Makoto,Inoue Masami

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.581846

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of Low-Frequency Power on Etching Characteristics of 6H-SiC in C4F8/Ar Dual-Frequency Capacitively Coupled Plasma;Plasma Science and Technology;2013-10

2. CHF3 dual-frequency capacitively coupled plasma;Acta Physica Sinica;2010

3. Control of reactive plasmas for low- k /Cu integration;Applied Surface Science;2007-06

4. Production of Fluorine-Containing Molecular Species in Plasma-Generated Atomic F Flows;The Journal of Physical Chemistry A;2003-08-30

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