Statistical considerations of the overlay error in laser driven point source x-ray lithography
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Published:2000
Issue:4
Volume:18
Page:1886
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Tiszauer Detlev H.
Publisher
American Vacuum Society
Subject
General Engineering